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[Dark field image of surface steps.]

[Dark field image of disordered surface.]

a) Dark field image of the Si(001) surface showing the presence of well-ordered surface steps on only one side after electron beam annealing treatment. Dark field image of Si(001) in which the side opposite the electron beam bombarded side was disordered using low-energy ions. All evidence of well-ordered steps has dissappeared.

Appl. Phys. Lett. 71, 2301-2303 (1997).